{"id":22426,"date":"2026-10-13T17:55:06","date_gmt":"2026-10-13T10:55:06","guid":{"rendered":"https:\/\/useful.vn\/?p=22426"},"modified":"2026-10-13T17:55:06","modified_gmt":"2026-10-13T10:55:06","slug":"intel-can-moc-mot-trieu-wafer-bang-may-quang-khac-high-na-euv","status":"publish","type":"post","link":"https:\/\/useful.vn\/?p=22426","title":{"rendered":"Intel c\u00e1n m\u1ed1c m\u1ed9t tri\u1ec7u wafer b\u1eb1ng m\u00e1y quang kh\u1eafc High-NA EUV"},"content":{"rendered":"
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\nIntel c\u00e1n m\u1ed1c m\u1ed9t tri\u1ec7u wafer b\u1eb1ng m\u00e1y quang kh\u1eafc High-NA EUV <\/h1>\n

Intel th\u00f4ng b\u00e1o \u0111\u00e3 x\u1eed l\u00fd h\u01a1n m\u1ed9t tri\u1ec7u t\u1ea5m wafer 300 mm b\u1eb1ng h\u1ec7 th\u1ed1ng High-NA EUV, v\u01b0\u1ee3t qua s\u1ea3n l\u01b0\u1ee3ng c\u1ee7a t\u1ea5t c\u1ea3 \u0111\u1ed1i th\u1ee7 c\u1ed9ng l\u1ea1i.<\/p>\n

Con s\u1ed1 m\u1ed9t tri\u1ec7u wafer c\u1ee7a Intel bao g\u1ed3m to\u00e0n b\u1ed9 qu\u00e1 tr\u00ecnh ch\u1ea1y th\u1eed nghi\u1ec7m, ch\u1ee9ng nh\u1eadn thi\u1ebft b\u1ecb, nghi\u00ean c\u1ee9u ph\u00e1t tri\u1ec3n \u0111\u1ebfn s\u1ea3n xu\u1ea5t th\u01b0\u01a1ng m\u1ea1i th\u1ef1c t\u1ebf. Hi\u1ec7n Intel \u0111\u00e3 \u1ee9ng d\u1ee5ng c\u00f4ng ngh\u1ec7 quang kh\u1eafc High-NA EUV cho ti\u1ebfn tr\u00ecnh Intel 18A \u0111\u1ec3 s\u1ea3n xu\u1ea5t m\u1ed9t s\u1ed1 chip x\u1eed l\u00fd th\u1ebf h\u1ec7 m\u1edbi mang m\u00e3 Panther Lake.<\/p>\n

Cu\u1ed1i n\u0103m 2024, ASML b\u00e0n giao m\u1eabu High-NA EUV \u0111\u1ea7u ti\u00ean, t\u1ee9c Twinscan EXE:5000, cho Intel. Hi\u1ec7n Intel s\u1edf h\u1eefu hai h\u1ec7 th\u1ed1ng Twinscan EXE:5000 c\u00f9ng \u00edt nh\u1ea5t m\u1ed9t h\u1ec7 th\u1ed1ng th\u1ebf h\u1ec7 m\u1edbi EXE:5200B. T\u1ed1c \u0111\u1ed9 x\u1eed l\u00fd c\u1ee7a h\u00e3ng \u0111\u00e3 t\u0103ng tr\u01b0\u1edfng nhanh ch\u00f3ng t\u1eeb m\u1ee9c 30.000 wafer \u0111\u1ea7u n\u0103m 2025 l\u00ean h\u01a1n m\u1ed9t tri\u1ec7u wafer.<\/p>\n

Theo Tom’s Hardware<\/em>, h\u1ed3i th\u00e1ng 4, nh\u00e0 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb ASML c\u00f4ng b\u1ed1 t\u1ed5ng s\u1ed1 t\u1ea5t c\u1ea3 m\u00e1y High-NA EUV \u0111\u00e3 giao cho to\u00e0n b\u1ed9 kh\u00e1ch h\u00e0ng tr\u00ean th\u1ebf gi\u1edbi m\u1edbi x\u1eed l\u00fd \u0111\u01b0\u1ee3c h\u01a1n 500.000 t\u1ea5m wafer. C\u00f3 ngh\u0129a, Intel \u0111\u00e3 s\u1ea3n xu\u1ea5t s\u1ed1 wafer High-NA EUV nhi\u1ec1u h\u01a1n ph\u1ea7n c\u00f2n l\u1ea1i c\u1ee7a ng\u00e0nh b\u00e1n d\u1eabn.<\/p>\n

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C\u00e1c k\u1ef9 s\u01b0 ASML \u0111ang ki\u1ec3m tra m\u1ed9t h\u1ec7 th\u1ed1ng quang kh\u1eafc. \u1ea2nh: ASML<\/em><\/p>\n<\/figcaption><\/figure>\n

Tuy nhi\u00ean, c\u1ed7 m\u00e1y High-NA EUV hi\u1ec7n v\u1eabn c\u00f2n m\u1ed9t s\u1ed1 h\u1ea1n ch\u1ebf. Trong khi h\u1ec7 th\u1ed1ng EUV truy\u1ec1n th\u1ed1ng c\u00f3 \u0111\u1ed9 ph\u00f3ng \u0111\u1ea1i 4X \u1edf c\u1ea3 hai chi\u1ec1u, cho ph\u00e9p chi\u1ebfu qu\u00e9t m\u1ed9t v\u00f9ng k\u00edch th\u01b0\u1edbc 26 x 33 mm b\u1eb1ng m\u1eb7t n\u1ea1 quang h\u1ecdc 6 inch chu\u1ea9n, c\u00f4ng ngh\u1ec7 High-NA EUV s\u1eed d\u1ee5ng \u0111\u1ed9 ph\u00f3ng \u0111\u1ea1i b\u1ea5t \u0111\u1eb3ng h\u01b0\u1edbng 4X\/8X, khi\u1ebfn m\u1eb7t n\u1ea1 6 inch ch\u1ec9 c\u00f3 th\u1ec3 chi\u1ebfu qu\u00e9t m\u1ed9t n\u1eeda v\u00f9ng, k\u00edch th\u01b0\u1edbc kho\u1ea3ng 26 x 16,5 mm.<\/p>\n

Do \u0111\u00f3, \u0111\u1ed1i v\u1edbi chip k\u00edch th\u01b0\u1edbc l\u1edbn, m\u00e1y High-NA ph\u1ea3i s\u1eed d\u1ee5ng k\u1ef9 thu\u1eadt gh\u00e9p \u1ea3nh, b\u1eb1ng c\u00e1ch th\u1ef1c hi\u1ec7n hai l\u1ea7n chi\u1ebfu \u0111\u1ec3 t\u1ea1o th\u00e0nh m\u1ed9t khu\u00f4n ho\u00e0n ch\u1ec9nh. D\u00f9 l\u00e0 gi\u1ea3i ph\u00e1p kh\u1ea3 thi hi\u1ec7n t\u1ea1i, k\u1ef9 thu\u1eadt n\u00e0y b\u1ed9c l\u1ed9 \u0111i\u1ec3m y\u1ebfu, khi n\u0103ng su\u1ea5t c\u1ee7a d\u00f2ng m\u00e1y EXE:5200B b\u1ecb gi\u1ea3m t\u1eeb 175 wafer\/gi\u1edd xu\u1ed1ng 125 wafer\/gi\u1edd do ph\u1ea3i chi\u1ebfu g\u1ea5p \u0111\u00f4i s\u1ed1 l\u1ea7n.<\/p>\n

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Kh\u00e1ch tham quan t\u1ea1i gian h\u00e0ng Intel \u1edf m\u1ed9t s\u1ef1 ki\u1ec7n v\u1ec1 \u0111\u1ed5i m\u1edbi s\u00e1ng t\u1ea1o t\u1ea1i H\u00e0 N\u1ed9i, th\u00e1ng 10\/2024. \u1ea2nh: L\u01b0u Qu\u00fd – Minh Minh<\/em><\/p>\n<\/figcaption><\/figure>\n

\u0110\u1ec3 kh\u1eafc ph\u1ee5c v\u1ea5n \u0111\u1ec1 gh\u00e9p \u1ea3nh, Intel \u0111ang n\u1ed7 l\u1ef1c chuy\u1ec3n \u0111\u1ed5i sang s\u1eed d\u1ee5ng m\u1eb7t n\u1ea1 quang h\u1ecdc kh\u1ed5 l\u1edbn h\u01a1n, k\u00edch th\u01b0\u1edbc 6×12 inch. Chu\u1ea9n m\u1edbi s\u1ebd cho ph\u00e9p chi\u1ebfu to\u00e0n b\u1ed9 v\u00f9ng 26 x 33 mm trong m\u1ed9t l\u1ea7n duy nh\u1ea5t. Tuy nhi\u00ean, vi\u1ec7c thay \u0111\u1ed5i k\u00edch th\u01b0\u1edbc m\u1eb7t n\u1ea1 quang h\u1ecdc \u0111\u00f2i h\u1ecfi s\u1ef1 t\u00e1i thi\u1ebft to\u00e0n b\u1ed9 h\u1ec7 sinh th\u00e1i s\u1ea3n xu\u1ea5t chip. T\u1ea5t c\u1ea3 quy tr\u00ecnh t\u1eeb s\u1ea3n xu\u1ea5t ph\u00f4i m\u1eb7t n\u1ea1 quang h\u1ecdc, kh\u1eafc, \u0111o l\u01b0\u1eddng, l\u00e0m s\u1ea1ch, m\u00e0ng b\u1ea3o v\u1ec7 \u0111\u1ebfn robot v\u1eadn chuy\u1ec3n \u0111\u1ec1u ph\u1ea3i thay m\u1edbi.<\/p>\n

C\u00e1c d\u00f2ng m\u00e1y High-NA EUV c\u1ee7a ASML hi\u1ec7n t\u1ea1i v\u00e0 trong l\u1ed9 tr\u00ecnh t\u1edbi n\u0103m 2033 \u0111\u1ec1u \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u1ef1a tr\u00ean chu\u1ea9n m\u1eb7t n\u1ea1 6 inch v\u00e0 k\u1ef9 thu\u1eadt gh\u00e9p \u1ea3nh, \u0111\u1ed3ng ngh\u0129a vi\u1ec7c chuy\u1ec3n sang m\u1eb7t n\u1ea1 6×12 inch \u0111\u00f2i h\u1ecfi nh\u1eefng c\u1ea3i ti\u1ebfn c\u01a1 kh\u00ed ph\u1ee9c t\u1ea1p.<\/p>\n

\u0110\u1ea7u 2024, ASML, c\u00f4ng ty c\u00f3 tr\u1ee5 s\u1edf t\u1ea1i th\u1ecb tr\u1ea5n Veldhoven c\u1ee7a H\u00e0 Lan, c\u00f4ng b\u1ed1 nh\u1eefng h\u00ecnh \u1ea3nh \u0111\u1ea7u ti\u00ean v\u1ec1 h\u1ec7 th\u1ed1ng quang kh\u1eafc si\u00eau c\u1ef1c t\u00edm s\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 kh\u1ea9u \u0111\u1ed9 s\u1ed1 l\u1edbn (High-NA EUV), gi\u00fap c\u00e1c c\u00f4ng ty b\u00e1n d\u1eabn ch\u1ebf t\u1ea1o chip v\u1edbi \u0111\u1ed9 ph\u1ee9c t\u1ea1p ch\u01b0a t\u1eebng th\u1ea5y.<\/p>\n

M\u1ed7i m\u00e1y High-NA EUV tr\u1ecb gi\u00e1 380 tri\u1ec7u USD (9.281 t\u1ef7 \u0111\u1ed3ng), n\u1eb7ng kho\u1ea3ng 150 t\u1ea5n, t\u01b0\u01a1ng \u0111\u01b0\u01a1ng hai m\u00e1y bay ch\u1edf kh\u00e1ch Airbus A320. Ph\u00e1t ng\u00f4n vi\u00ean ASML Monique Mols cho bi\u1ebft qu\u00e1 tr\u00ecnh v\u1eadn chuy\u1ec3n v\u00e0 l\u1eafp \u0111\u1eb7t m\u1ed7i m\u00e1y c\u1ea7n 250 th\u00f9ng h\u00e0ng v\u00e0 250 k\u1ef9 s\u01b0 l\u00e0m vi\u1ec7c li\u00ean t\u1ee5c 6 th\u00e1ng. Intel l\u00e0 kh\u00e1ch h\u00e0ng \u0111\u1ea7u ti\u00ean v\u00e0 tri\u1ec3n khai t\u1ea1i nh\u00e0 m\u00e1y \u1edf bang Oregon c\u1ee7a M\u1ef9.<\/p>\n

Quang kh\u1eafc l\u00e0 qu\u00e1 tr\u00ecnh in s\u01a1 \u0111\u1ed3 m\u1ea1ch l\u00ean b\u1ec1 m\u1eb7t c\u1ea3m quang c\u1ee7a t\u1ea5m silicon b\u1eb1ng c\u00e1ch chi\u1ebfu tia s\u00e1ng v\u1ec1 ph\u00eda t\u1ea5m n\u1ec1n silicon (wafer) qua m\u1ed9t \u0111\u0129a th\u1ee7y tinh \u0111\u01b0\u1ee3c v\u1ebd s\u1eb5n s\u01a1 \u0111\u1ed3 m\u1ea1ch. M\u1ea1ch c\u00e0ng nh\u1ecf c\u00e0ng c\u1ea7n nh\u1eefng \u0111\u00e8n chi\u1ebfu tia s\u00e1ng c\u00f3 b\u01b0\u1edbc s\u00f3ng ng\u1eafn h\u01a1n, trong \u0111\u00f3 tia si\u00eau c\u1ef1c t\u00edm EUV l\u00e0 b\u01b0\u1edbc ph\u00e1t tri\u1ec3n hi\u1ec7n \u0111\u1ea1i nh\u1ea5t hi\u1ec7n nay.<\/p>\n

Huy \u0110\u1ee9c- Minh Minh <\/strong>t\u1ed5ng h\u1ee3p<\/em><\/p>\n<\/article>\n

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https:\/\/vnexpress.net\/intel-can-moc-mot-trieu-wafer-bang-may-quang-khac-high-na-euv-5118099.html<\/p>\n","protected":false},"excerpt":{"rendered":"

Intel c\u00e1n m\u1ed1c m\u1ed9t tri\u1ec7u wafer b\u1eb1ng m\u00e1y quang kh\u1eafc High-NA EUV Intel th\u00f4ng b\u00e1o \u0111\u00e3 x\u1eed l\u00fd h\u01a1n m\u1ed9t tri\u1ec7u t\u1ea5m wafer 300 mm b\u1eb1ng h\u1ec7 th\u1ed1ng High-NA EUV, v\u01b0\u1ee3t qua s\u1ea3n l\u01b0\u1ee3ng c\u1ee7a t\u1ea5t c\u1ea3 \u0111\u1ed1i th\u1ee7 c\u1ed9ng l\u1ea1i. Con s\u1ed1 m\u1ed9t tri\u1ec7u wafer c\u1ee7a Intel bao g\u1ed3m to\u00e0n b\u1ed9 qu\u00e1 tr\u00ecnh ch\u1ea1y<\/p>\n","protected":false},"author":1,"featured_media":22427,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[],"class_list":["post-22426","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghe"],"_links":{"self":[{"href":"https:\/\/useful.vn\/index.php?rest_route=\/wp\/v2\/posts\/22426","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/useful.vn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/useful.vn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/useful.vn\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/useful.vn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=22426"}],"version-history":[{"count":0,"href":"https:\/\/useful.vn\/index.php?rest_route=\/wp\/v2\/posts\/22426\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/useful.vn\/index.php?rest_route=\/wp\/v2\/media\/22427"}],"wp:attachment":[{"href":"https:\/\/useful.vn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=22426"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/useful.vn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=22426"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/useful.vn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=22426"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}